JPH0436458Y2 - - Google Patents
Info
- Publication number
- JPH0436458Y2 JPH0436458Y2 JP8478788U JP8478788U JPH0436458Y2 JP H0436458 Y2 JPH0436458 Y2 JP H0436458Y2 JP 8478788 U JP8478788 U JP 8478788U JP 8478788 U JP8478788 U JP 8478788U JP H0436458 Y2 JPH0436458 Y2 JP H0436458Y2
- Authority
- JP
- Japan
- Prior art keywords
- blower
- air
- door
- chamber
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 11
- 238000007664 blowing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 238000004887 air purification Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Ventilation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8478788U JPH0436458Y2 (en]) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8478788U JPH0436458Y2 (en]) | 1988-06-27 | 1988-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH026276U JPH026276U (en]) | 1990-01-16 |
| JPH0436458Y2 true JPH0436458Y2 (en]) | 1992-08-27 |
Family
ID=31309467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8478788U Expired JPH0436458Y2 (en]) | 1988-06-27 | 1988-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436458Y2 (en]) |
-
1988
- 1988-06-27 JP JP8478788U patent/JPH0436458Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH026276U (en]) | 1990-01-16 |
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